• 4 channel chemical particle counter
• 0.1, 0.2, 0.5 and 1.0 μm particle monitoring size range
• Operates with an optimal flow rate of 300 ml/min. +/-10%
• Samples 1% of the flow volume or 3 ml/min
• Compatible with corrosive liquids, including hydrogen fluoride (HF)
• eSeries compatible with Facility Net Software
• Existing network can be used with ethernet communication to Facility Net Software

Sensitivity range: 0.1 – 1.0 µm

• Monitoring chemical delivery systems
• Measuring filter efficiency
• Episodic event tracking and alarming
• Continuous chemical particle system monitoring