• 0.2 – 20.0 μm particle counter size range
• Up to 80 ml/min flow rate
• Compatible with a wide range of process chemicals
• Small footprint for easy placement anywhere in the process
• User-selected particle size threshold

S02: 0.2 – 2.0 µm, S03: 0.3 – 3.0 µm, S05: 0.5 – 20.0 µm

• In-line and batch sampling capabilities
• Effervescent chemical measurements using compression sampling
• Chemical quality assurance
• Process bath monitoring
• DI water monitoring
• Chemical delivery systems
• Photoresist monitoring