• 20 nm Chemical particle counter now with Syringe particle sampling capability
• Advanced laser optics and detectors enable 20 nm particle sensitivity in chemicals
• On-board chemical flow meter to set sample flow
• First chemical particle counter optimized for low and high refractive index chemicals for improved performance:
  • Chem 20 chemical particle counter, for chemicals with lower indices of refraction
  • Chem 20-HI chemical particle counter, tailored for sulfuric acid and other higher-index chemicals
• On-board leak detection to provide alarm upon an internal chemical leak
• Low-flow detector and alarm to ensure consistent data
• Bubble detector to optimize data and protect sensor
• Local data display

• Detect 20 nm PSL & 9 nm Au particles in real time
• Now 20 nm testing is easily accomplished in both online and offline applications
• Detect yield-limiting particles (not possible with competitive technologies)
• React quickly to particle excursions long before surface scan or yield data are available
• Optimize chemical delivery systems from the loading dock to point-of-process
• Tighten process control limits through improved sample population statistics
• Optimize instrument operation for very dirty or very clean applications using two view modes, extending product application space
• Support legacy data acquisition systems with flexible communications

• Real-time particle monitoring within chemical distribution systems
• Point-of-process monitoring
• Chemical packaging operations monitoring
• Chemical filter performance and efficiency characterization
• Chemical QA and verification
• Performance testing of chemical handling components