薬液用20nm液中パーティクルカウンタ: Chem™ 20
可測粒径: 20-100 nm / 流量: 35 mLPM
Chem 20™ は、最先端のエレクトロニクス産業で使われる高純度薬液中の不溶性微粒子を常時モニタリングするために開発された、高感度の液中パーティクルカウンタです。超純水用の液中パーティクルカウンタ Ultra DI®シリーズで実績のある光学系構造をさらに進化させることにより、粒径20 mmの微粒子(20nmのPSL粒子、 9nmのAu粒子)の検出が、高純度薬液でも可能になりました。
Chem 20は、SLS-20シリンジサンプラを組み合わせることで、バッチ測定にも対応します。
主な仕様
- 20 nm Chemical particle counter now with Syringe particle sampling capability
- Advanced laser optics and detectors enable 20 nm particle sensitivity in chemicals
- On-board chemical flow meter to set sample flow
- First chemical particle counter optimized for low and high refractive index chemicals for improved performance:
- Chem 20 chemical particle counter, for chemicals with lower indices of refraction
- Chem 20-HI chemical particle counter, tailored for sulfuric acid and other higher-index chemicals
- On-board leak detection to provide alarm upon an internal chemical leak
- Low-flow detector and alarm to ensure consistent data
- Bubble detector to optimize data and protect sensor
- Local data display
- Detect 20 nm PSL & 9 nm Au particles in real time
- Now 20 nm testing is easily accomplished in both online and offline applications
- Detect yield-limiting particles (not possible with competitive technologies)
- React quickly to particle excursions long before surface scan or yield data are available
- Optimize chemical delivery systems from the loading dock to point-of-process
- Tighten process control limits through improved sample population statistics
- Optimize instrument operation for very dirty or very clean applications using two view modes, extending product application space
- Support legacy data acquisition systems with flexible communications
- Real-time particle monitoring within chemical distribution systems
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Chemical QA and verification
- Performance testing of chemical handling components
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